Experimental Physics and Quantum Optics X-Ray

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Ulf Kleineberg

Prof. Dr. Ulf Kleineberg

Group Leader


research expertise and fields

Soft x-ray optics/physics, surface and thin film physics, attosecond physics; synchrotron radiation and FEL physics
Electron microscopy, electron beam lithography, nanolithography, self assembly
Development of multilayer soft x-ray optics for attosecond XUV pulses
Measurement and control of electronic dynamics in nanostructures
Ultrafast nano-plasmonics
Time-resolved x-ray photoelectron spectroscopy and photoelectron emission microscopy
Metrology for extreme ultraviolet lithography EUVL

current interests and projects

Ultrawide band instrumentation
Pushing the frontiers of attosecond metrology and spectroscopy
Collective electron dynamics in metallic nanoparticles
Ultrashort x-ray sources
Probing the spatio-temporal dynamics of localized surface plasmon fields with nanometer spatial and attosecond temporal resolution
Setup of a highly brillant coherent EUV light source for metrology and nanolithography in the EUV spectral range


Am Coulombwall 1
85748 Garching

Room: 223
Phone: +49(0)89/289-14003
Fax: +49(0)89/289-14141

Website: http://www.attoworld.de/

Office hours:
Di 10:00-12:00 (please register first)